Title:
VACUUM PUMP AND DAMPER FOR VACUUM PUMP
Document Type and Number:
Japanese Patent JP2019163751
Kind Code:
A
Abstract:
To provide a vacuum pump and a damper for the vacuum pump having a simple structure, capable of increasing vibration eliminating characteristic in a twisting direction and also restricting displacement between the facing flanges to each other to enable O-ring or resilient body to be prevented against their fracture and damage.SOLUTION: This invention comprises a first annular flange 13 and a second annular flange 14 oppositely arranged to each other; O-rings 16 and an intermediate ring 15 arranged between the first flange 13 and the second flange 14; O-rings 16 each of which is arranged between the first flange 13 and the intermediate ring 15 and between the intermediate ring 15 and the second flange 14, respectively; several elastic bodies 17 spot arranged in peripheral directions of central holes 13a, 14a between the first flange 13 and the intermediate ring 15 and between the first flange 13 and the second flange 14, respectively; and an airtight holding means 51 having position setting pins 41 arranged in sequence within position setting holes 13e, 15e, 14e each of which is arranged at the first flange 13, the intermediate ring 15 and the second flange 14, respectively.SELECTED DRAWING: Figure 1
Inventors:
KAWASHIMA TOSHIAKI
Application Number:
JP2018053269A
Publication Date:
September 26, 2019
Filing Date:
March 20, 2018
Export Citation:
Assignee:
EDWARDS KK
International Classes:
F04D19/04; F04D29/08; F04D29/42; F16F15/08
Domestic Patent References:
| JP2010169102A | 2010-08-05 | |||
| JPS5023368Y1 | 1975-07-15 | |||
| JP2011226466A | 2011-11-10 | |||
| JP2008088956A | 2008-04-17 |
Foreign References:
| GB2552324A | 2018-01-24 | |||
| US5671956A | 1997-09-30 |
Attorney, Agent or Firm:
Takamitsu Shimizu