Title:
MEASUREMENT OBJECT TEMPERATURE CALCULATION METHOD
Document Type and Number:
Japanese Patent JP2019168426
Kind Code:
A
Abstract:
To provide a measurement object temperature calculation method with which it is possible to reduce the data amount of a temperature table while maintaining temperature accuracy.SOLUTION: The measurement object temperature calculation method includes: creating the temperature table of a measurement object temperature and detection- and compensation-side resistance values in advance; measuring the detection- and compensation-side resistance values; selecting a value closest to the compensation-side resistance value from the temperature table and defining it as an approximate compensation temperature, and calculating a calculated detection temperature and a calculated compensation temperature on the basis of the detection- and compensation-side resistance values using the temperature table and an approximation expression; calculating a detection temperature that corresponds to the selected approximate compensation temperature for use as temperature table reference by formula (1); and determining a target temperature by the temperature table and a linear approximation using a converted detection-side resistance value that is converted from this using the temperature table and the approximation expression and an approximate compensation temperature. Formula (1): T=T+(T-T).SELECTED DRAWING: Figure 1
Inventors:
NISHIYAMA MASAFUMI
TASATO KAZUYOSHI
NAKAMURA KENZO
TASATO KAZUYOSHI
NAKAMURA KENZO
Application Number:
JP2018058491A
Publication Date:
October 03, 2019
Filing Date:
March 26, 2018
Export Citation:
Assignee:
MITSUBISHI MATERIALS CORP
International Classes:
G01J5/20; G01J5/10
Attorney, Agent or Firm:
Hideyuki Sugiura