Title:
PRESSURE REDUCING APPARATUS AND PRESSURE REDUCING METHOD
Document Type and Number:
Japanese Patent JP2019173147
Kind Code:
A
Abstract:
To provide a pressure reducing apparatus capable of suppressing reduction in an apparatus utilization rate due to an oil exchange caused by evacuating atmosphere and a cost increase due to a limitation of a manufacturing method, and a pressure reducing method.SOLUTION: In a pressure reducing apparatus having a reaction chamber which can be evacuated and an exhaust part for exhausting gas inside the reaction chamber, the exhaust part has a first exhaust part and a second exhaust part, the first exhaust part has a main exhaust path, a main exhaust valve, a first slow exhaust path, a first slow exhaust valve and a main vacuum pump, and the second exhaust part has a second slow exhaust path, a second slow exhaust valve, and a sub-vacuum pump.SELECTED DRAWING: Figure 1
Inventors:
KOJIMA YASUO
ABE YUKIHIRO
OWAKI HIRONORI
UENO TAKANORI
OHIRA JUN
ABE YUKIHIRO
OWAKI HIRONORI
UENO TAKANORI
OHIRA JUN
Application Number:
JP2018066099A
Publication Date:
October 10, 2019
Filing Date:
March 29, 2018
Export Citation:
Assignee:
CANON KK
International Classes:
C23C16/44; G03G5/08
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa