Title:
VACUUM PUMP
Document Type and Number:
Japanese Patent JP2019178655
Kind Code:
A
Abstract:
To provide a vacuum pump that can restrain solidification of gas while the pump is normally operated.SOLUTION: The inside of a casing 11 comprising an intake port 11b for sucking gas from the outside and an exhaust port 11a for discharging the sucked gas to the outside is provided with a turbo molecular pump mechanism PA comprising rotor blades 23 and stator blades 31 alternately arranged in multiple stages in an axial direction, a screw groove pump mechanism PB continuously provided on the side of an exhaust port 18a of the turbo molecular pump mechanism PA, first temperature adjustment means 39 for cooling and adjusting temperature of the turbo molecular pump mechanism PA, and second temperature adjustment means 40 for heating and adjusting the turbo molecular pump mechanism PA.SELECTED DRAWING: Figure 1
Inventors:
MIWATA TORU
TAKAI YOSHIYUKI
SAKAGUCHI YUKO
TAKAI YOSHIYUKI
SAKAGUCHI YUKO
Application Number:
JP2018069353A
Publication Date:
October 17, 2019
Filing Date:
March 30, 2018
Export Citation:
Assignee:
EDWARDS KK
International Classes:
F04D19/04
Domestic Patent References:
| JP2002180988A | 2002-06-26 | |||
| JPH07508082A | 1995-09-07 |
Attorney, Agent or Firm:
Takamitsu Shimizu