Title:
ORGANIC FILM FORMATION DEVICE
Document Type and Number:
Japanese Patent JP2019184229
Kind Code:
A
Abstract:
To provide an organic film formation device capable of forming the organic film by applying heat of less heat loss but with high heat storage efficiency to a base plate coated with a solution containing an organic material and a solvent.SOLUTION: An organic film formation device 1 comprises a chamber 10 capable of keeping atmosphere reduced in pressure to be lower than an atmospheric pressure; an exhausting part 20 capable of exhausting an inner side of the chamber; a first heating part 32 having a first heater 32a arranged in the chamber; a second heating part 32 having a second heater 32a; a first uniform heating plate 34a and a second uniform heating plate 34b arranged between the first heating part and the second heating part; processing areas 30a, 30b which are present between the first uniform heat plate and the second uniform heat plate and in which a work piece 100 is supported; and a first reflection plate 36 which is provided in the chamber and encloses an area including the first heating part, the second heating part, the first uniform heat plate, the second uniform heat plate and the processing areas, and reflects the incidence heat toward the processing areas.SELECTED DRAWING: Figure 1
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Inventors:
TAKAHASHI TAKASHI
ISO AKINORI
ISHIHARA JUNJI
ISO AKINORI
ISHIHARA JUNJI
Application Number:
JP2019045511A
Publication Date:
October 24, 2019
Filing Date:
March 13, 2019
Export Citation:
Assignee:
SHIBAURA MECHATRONICS CORP
International Classes:
F26B5/04; F26B3/28
Attorney, Agent or Firm:
Masahiko Hinataji