Title:
VACUUM PUMP, AND CONTROL DEVICE OF VACUUM PUMP
Document Type and Number:
Japanese Patent JP2019190304
Kind Code:
A
Abstract:
To provide a vacuum pump capable of determining a rotating direction without additionally using an exclusive rotating direction sensor and correcting the rotating direction even in a state of low speed rotation.SOLUTION: At least a first state in which a rotor shaft 21 rotates at a relatively high speed, and a second state in which the rotor shaft 21 rotates at a relatively low speed while deflecting and revolving within a range of a clearance H with respect to a protective bearing 36 can be taken, output information of a radial direction displacement sensor is acquired, a rotating direction of the rotor shaft 21 based on the output information is determined in the second state, whether the rotating direction is normal or not is determined, and the rotation is stopped and the rotating speed to the normal rotating direction is increased, when the rotating direction is not normal.SELECTED DRAWING: Figure 9
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Inventors:
FUKAMI HIDEO
OTACHI YOSHINOBU
MAEJIMA YASUSHI
TAKAADA TSUTOMU
OTACHI YOSHINOBU
MAEJIMA YASUSHI
TAKAADA TSUTOMU
Application Number:
JP2018081113A
Publication Date:
October 31, 2019
Filing Date:
April 20, 2018
Export Citation:
Assignee:
EDWARDS KK
International Classes:
F04D19/04
Domestic Patent References:
| JP2013185578A | 2013-09-19 | |||
| JP2012193705A | 2012-10-11 | |||
| JP2009121351A | 2009-06-04 |
Foreign References:
| US6050782A | 2000-04-18 |
Attorney, Agent or Firm:
Koji Mizuno
Ryo Matsushita
Keita Noguchi
Ryo Matsushita
Keita Noguchi