Title:
LASER TYPE GAS ANALYSIS METER
Document Type and Number:
Japanese Patent JP2019197028
Kind Code:
A
Abstract:
To provide a laser type gas analysis meter improving measurement accuracy of component density.SOLUTION: A laser type gas analysis meter 100 comprises: a light emission part 11 for radiating a laser beam 11a to a measurement object gas; a reflection part 28 for reflecting the laser beam 11a which has passed the measurement object gas; a light reception part 13 for receiving the laser beam 11a from the reflection part 28; a control part 15 for controlling the light emission part 11 and processing an output signal from the light reception part 13; a measurement object gas passage part 22 having openings 22a, 22b into which the measurement object gas enters and from which the measurement object gas exits; a purge area part 24 in which the purge gas including no measurement object gas is filled; and a separation wall part 26 having an aperture 26a through which the laser beam 11a can pass. The separation wall part 26 comprises a minute irregularity for promoting diffusion of the laser beam 11a on a surface facing the light emission part 11 or the surface facing the light emission part is subjected to surface processing for promoting diffusion or absorption of the laser beam 11a.SELECTED DRAWING: Figure 1
Inventors:
UNNO YUSAKU
MATSUO JUNICHI
MATSUO JUNICHI
Application Number:
JP2018092398A
Publication Date:
November 14, 2019
Filing Date:
May 11, 2018
Export Citation:
Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
G01N21/01; G01N21/3504
Domestic Patent References:
| JPS62184458U | 1987-11-24 | |||
| JP2013245951A | 2013-12-09 | |||
| JP2012053037A | 2012-03-15 |
Foreign References:
| US20140291526A1 | 2014-10-02 |
Attorney, Agent or Firm:
Kenji Sugimura
Mitsutsugu Sugimura
Tatsuya Tanaka
Kiyoshi Shinno
Mitsutsugu Sugimura
Tatsuya Tanaka
Kiyoshi Shinno