Title:
CONTROL METHOD OF GATE VALVE
Document Type and Number:
Japanese Patent JP2019199879
Kind Code:
A
Abstract:
To suppress dispersion of particles only by controlling a gate valve, in opening the gate valve in response to an outside air pressure in a chamber.SOLUTION: A control method of a gate valve includes acquiring a torque maximum value in advance when a pressure in a chamber is reduced by closing a valve element under an outside air pressure, in the gate valve in which torque of a motor for driving the valve element is detected and the valve element is pressed to an opening portion of the chamber, detecting the torque in introducing a vent gas into the chamber before opening the valve element by returning the chamber to the outside air pressure, opening the valve element so that a clearance is generated between the valve element and the opening portion of the chamber when the torque becomes over the torque maximum value, and fully opening the valve element after releasing particles with the gas in the chamber.SELECTED DRAWING: Figure 1
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Inventors:
NAGAI HIDEAKI
SAWAHATA TOMOHIRO
SAITO KATSUYUKI
ARAKI SHUICHI
HIDA YOSHIMOTO
IKEDA MITSUHIRO
SAWAHATA TOMOHIRO
SAITO KATSUYUKI
ARAKI SHUICHI
HIDA YOSHIMOTO
IKEDA MITSUHIRO
Application Number:
JP2018092779A
Publication Date:
November 21, 2019
Filing Date:
May 14, 2018
Export Citation:
Assignee:
V TEX KK
International Classes:
F16K3/18; H01L21/02; H01L21/677
Domestic Patent References:
| JP2008186864A | 2008-08-14 | |||
| JP2013231461A | 2013-11-14 | |||
| JP2003194671A | 2003-07-09 | |||
| JP2014190663A | 2014-10-06 |
Attorney, Agent or Firm:
Nichimine International Patent Office