Title:
HYDROSTATIC SUPPORT DEVICE
Document Type and Number:
Japanese Patent JP2019210955
Kind Code:
A
Abstract:
To provide a hydrostatic support device which can accurately recognize a flow rate of fluid supplied to hydrostatic pockets.SOLUTION: A hydrostatic support device 1 comprises: hydrostatic pockets 20 provided at guiding surfaces 11a, 12a of a moving body 11 or a fixed body 12; a fluid supply device 30 supplying pressurized fluid to the hydrostatic pockets; a fluid supply flow passage 40 forming a fluid passage extending to the hydrostatic pockets from the fluid supply device; a variable throttle valve 50 provided in the fluid supply flow passage, and controlling a flow rate of the fluid supplied to the hydrostatic pockets, by the displacement of a diaphragm 86; a strain gauge 60 pasted to at least either one side or the other side of the diaphragm; and a calculation device 80a calculating a displacement position Pd of the diaphragm on the basis of a strain signal output by the strain gauge, and calculating, as a first flow rate Q1, the flow rate of the fluid supplied to the hydrostatic pockets using the calculated displacement position.SELECTED DRAWING: Figure 1
Inventors:
KONDO TAKASHI
KANEBAKO TAKANORI
KANEBAKO TAKANORI
Application Number:
JP2018104703A
Publication Date:
December 12, 2019
Filing Date:
May 31, 2018
Export Citation:
Assignee:
JTEKT CORP
International Classes:
F16C32/06
Attorney, Agent or Firm:
Kobayashi Osamu
Kiichi Yamamoto
Kimura Gunji
Kiichi Yamamoto
Kimura Gunji