Title:
振動絶縁装置、リソグラフィ装置、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP2019514033
Kind Code:
A
Abstract:
本発明は、ベース（１０）と、感振体に結合される結合要素（２０）と、減結合マス（３０）と、ベース（１０）と減結合マス（３０）との間に配置された第一振動絶縁装置部（３１）と、減結合マス（３０）と結合要素（２０）との間に配置された第二振動絶縁装置部（４０）とを備え、第一振動絶縁装置部および第二振動絶縁装置部の少なくとも一方が空気式絶縁装置を備える、振動絶縁装置（ＶＩ）に関する。【選択図】 図３
Inventors:
Butler, hands
De Horn, Cornelius, Adrinus, Lambertus
Jacobs, Franciscus, Matisse
Kagan, Pavel
Star Reveld, Yoroen, Peter
Wikmans, Maurice, Willem, Joseph, Etienne
De Horn, Cornelius, Adrinus, Lambertus
Jacobs, Franciscus, Matisse
Kagan, Pavel
Star Reveld, Yoroen, Peter
Wikmans, Maurice, Willem, Joseph, Etienne
Application Number:
JP2018543357A
Publication Date:
May 30, 2019
Filing Date:
February 03, 2017
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
G03F7/20; F16F15/02; F16F15/023; F16F15/04; H01L21/68
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Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito