Title:
INSPECTION APPARATUS AND CLEANING METHOD OF INSPECTION APPARATUS
Document Type and Number:
Japanese Patent JP2020010006
Kind Code:
A
Abstract:
To increase cleanliness factor, without up-sizing an inspection apparatus.SOLUTION: An inspection apparatus for inspecting an inspection object includes an inspection part inspecting the electrical characteristics of the inspection object, an air flow source provided in the inspection part and generating air flow for cooling the inside of the inspection part, an alignment part where the inspection object is placed, and aligning the inspection object and the inspection part, an enclosure for receiving the inspection part and the alignment part in the same space, and a circulation mechanism for circulating gaseous matter by the air flow source, between an area in the space where the alignment part is located and the inside of the inspection part, and cooling the circulating gaseous matter, and an extraneous material removal part for removing the extraneous material from the circulating gaseous matter.SELECTED DRAWING: Figure 3
Inventors:
ENDO TOMOYA
KONISHI KENTARO
KONISHI KENTARO
Application Number:
JP2018132663A
Publication Date:
January 16, 2020
Filing Date:
July 12, 2018
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/66; G01R31/26
Domestic Patent References:
| JP2013156084A | 2013-08-15 | |||
| JP2015084356A | 2015-04-30 | |||
| JPH01157544A | 1989-06-20 | |||
| JPH0541424A | 1993-02-19 | |||
| JP2017168857A | 2017-09-21 |
Attorney, Agent or Firm:
Tetsuo Kanamoto
Koji Hagiwara
Naoki Ogita
Koji Hagiwara
Naoki Ogita