Title:
PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2020012698
Kind Code:
A
Abstract:
To provide a pressure sensor in which a joint layer made of glass rarely cracks and sensitivity to a pressure change (accuracy of pressure detection) is good.SOLUTION: A total area A of a first surface 160c and a total area B of a blow hole 162 the diameter of which among blow holes 162 included in the first surface 160c is 1 μm or greater satisfy the relationship (B/A)≥0.02. Furthermore, no blow holes 162 exist on a second surface 170c that are in contact with both of two slit surfaces 150s constituting a slit S of a pressure detection element 150, and a total length C of joint layer contact part 160b of the joint layer 160 that is in contact with the pressure detection element 150 and is linear and a total length D of a blow hole contact part 162b of the blow hole 162 whose diameter is 1 μm or greater that is in contact with the pressure detection element 150 and is linear satisfy the relationship (D/C)≤0.35.SELECTED DRAWING: Figure 11
Inventors:
OHORI HIROKAZU
Application Number:
JP2018134194A
Publication Date:
January 23, 2020
Filing Date:
July 17, 2018
Export Citation:
Assignee:
NGK SPARK PLUG CO
International Classes:
G01L9/00; H01L29/84
Attorney, Agent or Firm:
Cosmos International Patent and Trademark Office