Title:
CUTTING DEVICE
Document Type and Number:
Japanese Patent JP2020028947
Kind Code:
A
Abstract:
To provide a cutting device capable of accurately and easily detecting flapping of a blade.SOLUTION: A cutting device includes: a table on which an object is installed; a cutting section which has a blade 32 for cutting the object and a rotary drive section for rotating the blade; a Z-axis movement mechanism which moves the table or the cutting section in a Z-axis direction for changing a distance between an installation surface and a rotary shaft; An X-axis movement mechanism which moves the table or the cutting section in an X-axis direction; and a first photoelectric detection section 40 which has a first emitting section 42 for emitting light and a first incident section 44 which is arranged to hold an edge section of the blade 32 between itself and the first emitting section and makes light emitted in the first emitting section incident and detects a position of the edge section. A first detection shaft for connecting the first emitting section 42 and the first incident section 44 intersects with a rotary surface of the blade 32 in an oblique direction.SELECTED DRAWING: Figure 4
Inventors:
NAOI KATSUO
TSUDA HIROSHI
SADACHI TATSUO
TSUDA HIROSHI
SADACHI TATSUO
Application Number:
JP2018155717A
Publication Date:
February 27, 2020
Filing Date:
August 22, 2018
Export Citation:
Assignee:
TDK CORP
International Classes:
B24B27/06; B24B49/12; H01L21/301
Domestic Patent References:
| JP2012040651A | 2012-03-01 | |||
| JPH0388345U | 1991-09-10 | |||
| JP2006116690A | 2006-05-11 | |||
| JP2009206363A | 2009-09-10 | |||
| JP2005028479A | 2005-02-03 | |||
| JP2012169557A | 2012-09-06 | |||
| JP2006294641A | 2006-10-26 |
Attorney, Agent or Firm:
Maeda/Suzuki International Patent Corporation