Title:
DRAWING DEVICE AND DRAWING METHOD
Document Type and Number:
Japanese Patent JP2020040029
Kind Code:
A
Abstract:
To provide a technology that reduces a device area of a drawing device.SOLUTION: A drawing device includes a drawing part and a maintenance part. The drawing part discharges functional fluid to a work that moves along a transportation direction to perform drawing on the work. The maintenance part maintains a head of the drawing part while moving downward of the drawing part along the transportation direction.SELECTED DRAWING: Figure 2B
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Inventors:
MIYAZAKI KAZUHITO
OTA YOSHIHARU
OTA YOSHIHARU
Application Number:
JP2018170426A
Publication Date:
March 19, 2020
Filing Date:
September 12, 2018
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
B05C11/10; B05C5/00; B05D1/26; B41J2/01; B41J2/165
Domestic Patent References:
| JP2016077966A | 2016-05-16 | |||
| JP2010198028A | 2010-09-09 | |||
| JP2015188877A | 2015-11-02 | |||
| JP2008155113A | 2008-07-10 | |||
| JP2011075789A | 2011-04-14 | |||
| JP2004014393A | 2004-01-15 | |||
| JP2007307915A | 2007-11-29 | |||
| JP2010164776A | 2010-07-29 | |||
| JP2009274068A | 2009-11-26 |
Foreign References:
| US20080024532A1 | 2008-01-31 | |||
| US20180065293A1 | 2018-03-08 | |||
| US20160288508A1 | 2016-10-06 |
Attorney, Agent or Firm:
Sakai International Patent Office