Title:
PRESSURE SENSOR ELEMENT AND PRESSURE SENSOR MODULE PROVIDED WITH IT
Document Type and Number:
Japanese Patent JP2020046177
Kind Code:
A
Abstract:
To measure a pressure with high accuracy by obtaining a desired linearity in a change in capacitance between the membrane and the fixed electrode with respect to a change in pressure on the membrane.SOLUTION: A pressure sensor element 20 of a pressure sensor module 10 comprises a membrane 22 that is deformed by receiving pressure, a plurality of fixed electrodes 24 and 26 respectively provided with electrode surfaces 24a and 26a facing the membrane 22, and a dielectric film 28 provided on each electrode surface 24a, 26a of the plurality of fixed electrodes 24, 26. The plurality of fixed electrodes 24 and 26 are arranged side by side in a direction from a center of the membrane 22 to an outside.SELECTED DRAWING: Figure 1
Inventors:
HAMAZAKI RYOHEI
Application Number:
JP2016247055A
Publication Date:
March 26, 2020
Filing Date:
December 20, 2016
Export Citation:
Assignee:
MURATA MANUFACTURING CO
International Classes:
G01L9/00; H01L29/84
Attorney, Agent or Firm:
Takuji Yamada
Mitsuo Tanaka
Hiroshi Okabe
Mitsuo Tanaka
Hiroshi Okabe