Title:
MEASUREMENT METHOD AND MEASUREMENT DEVICE
Document Type and Number:
Japanese Patent JP2020064127
Kind Code:
A
Abstract:
To provide a measurement method and a measurement device capable of quickly measuring the shape of a measurement surface of a specimen.SOLUTION: A measurement method using a confocal optical system 20 includes the steps of condensing reflection light 12 reflected on a measurement surface 51 of a specimen 50 by an object lens 34, making the reflection light 12 condensed by the objective lens 34 incident on a corner part of a prism including a first reflection surface 36a and a second reflection surface 36b to split the reflection light 12, making first reflection light 12a, out of the split reflection light 12, reflected on the first reflection surface 36a incident on a bundle fiber 39 including a first channel 39a and a second channel 39b, detecting first intensity of the first reflection light 12a having penetrated the first channel 39a and second intensity of the same having penetrated the second channel, and measuring a position of the measurement surface 51 with respect to a focal point 53 of the objective lens 34 on the basis of the first intensity and the second intensity.SELECTED DRAWING: Figure 1
Inventors:
TORISAWA MAKOTO
KUSUSE HARUHIKO
KUSUSE HARUHIKO
Application Number:
JP2018194761A
Publication Date:
April 23, 2020
Filing Date:
October 16, 2018
Export Citation:
Assignee:
LASERTEC CORP
International Classes:
G02B21/00; G01B11/24; G02B7/28; G02B7/32; G02B7/40; G02B21/06; G02B21/24
Domestic Patent References:
| JP2008152011A | 2008-07-03 | |||
| JP2010091343A | 2010-04-22 | |||
| JPS6225210A | 1987-02-03 | |||
| JPH07103729A | 1995-04-18 |
Foreign References:
| US20050092893A1 | 2005-05-05 |
Attorney, Agent or Firm:
Ken Ieiri
Yasuhiro Iwase
Yasuhiro Iwase