Title:
METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION ELEMENT
Document Type and Number:
Japanese Patent JP2020072085
Kind Code:
A
Abstract:
To provide a method for manufacturing a photoelectric conversion element with high practicality.SOLUTION: A method for manufacturing a photoelectric conversion element comprises the steps of: (1) arranging an unpatterned first electrode on a substrate; (2) arranging an unpatterned first layer composed of a metal oxide containing zinc (Zn), silicon (Si), and oxygen (O) in an upper part of the unpatterned first electrode; (3) forming a patterned first electrode and a patterned first layer by patterning the unpatterned first electrode and the unpatterned electrode together; (4) arranging a photoelectric conversion layer for converting an applied voltage to light or converting incident light to electric power in an upper part of the patterned first layer; and (5) arranging a second electrode in an upper part of the photoelectric conversion layer.SELECTED DRAWING: Figure 3
Inventors:
MASUSHIGE KUNIO
NAKAMURA NOBUHIRO
WATANABE AKIRA
NAKAMURA NOBUHIRO
WATANABE AKIRA
Application Number:
JP2019154442A
Publication Date:
May 07, 2020
Filing Date:
August 27, 2019
Export Citation:
Assignee:
AGC INC
International Classes:
H05B33/10; C23C14/08; H01L51/44; H01L51/46; H01L51/50; H05B33/26; H05B33/28
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito