Title:
METHOD FOR MANUFACTURING QUATERNARY ALKYLAMMONIUM HYPOCHLORITE SOLUTION
Document Type and Number:
Japanese Patent JP2020083854
Kind Code:
A
Abstract:
PURPOSE: To provide a method capable of producing a solution having high purity by a simple operation, in a method for producing a quaternary alkylammonium hypochlorite solution which can also be used in a treatment liquid used in a process for manufacturing a semiconductor device.SOLUTION: There is provided a method for producing a quaternary alkylammonium hypochlorite solution, by distilling a solution containing hypochlorous acid to separate hypochlorous acid and bringing the obtained hypochlorous acid into contact with a quaternary alkylammonium hydroxide solution.SELECTED DRAWING: Figure 1
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Inventors:
NEGISHI TAKAYUKI
YOSHIKAWA YOSHIKI
SHIMODA ATSUSHI
TONO SEIJI
YOSHIKAWA YOSHIKI
SHIMODA ATSUSHI
TONO SEIJI
Application Number:
JP2018225013A
Publication Date:
June 04, 2020
Filing Date:
November 30, 2018
Export Citation:
Assignee:
TOKUYAMA CORP
International Classes:
C07C209/20; C07C211/63