Title:
CUTTER ORIGINAL POSITION REGISTRATION METHOD
Document Type and Number:
Japanese Patent JP2020121374
Kind Code:
A
Abstract:
To obtain a high-accuracy cut depth with respect to a processed product even if a variation occurs in a height of a holding face of a chuck table.SOLUTION: A cutter original position registration method comprises: a sheet holding step ST1 for holding a sheet of a dicing tape having a prescribed thickness at a holding face of a chuck table; a cut mark formation step ST2 for lifting and lowering a cutting unit from a surface of the dicing tape by a prescribed amount in a Z-axis direction, and forming cut marks having depths for making a cutting blade not cut the dicing tape completely at a plurality of XY-coordinates of the chuck table; and an original position registration step ST3 for detecting lengths of a plurality of the cut marks with respect to the XY-coordinates by using a camera unit, calculating cut depths of the cut marks from the lengths of the cut marks and an outside diameter of the cutting blade, and indexing and storing an original position from the cut depths and a thickness of the dicing tape in correspondence with the XY-coordinates.SELECTED DRAWING: Figure 4
More Like This:
Inventors:
KOZAI HIROHIKO
KITANO TAKAYUKI
KITANO TAKAYUKI
Application Number:
JP2019014695A
Publication Date:
August 13, 2020
Filing Date:
January 30, 2019
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B47/22; B24B27/06; H01L21/301
Domestic Patent References:
| JP2015142022A | 2015-08-03 |
Attorney, Agent or Firm:
Sakai International Patent Office