Title:
OPTICAL APPARATUS, EXPOSURE DEVICE AND METHOD FOR MANUFACTURING ARTICLE
Document Type and Number:
Japanese Patent JP2021021932
Kind Code:
A
Abstract:
To provide an optical apparatus that is advantageous to suppression of adherence of contaminant onto an optical component.SOLUTION: An optical apparatus is provided that has: a lens barrel formed with an opening causing light to pass through the same; an optical component which includes a surface having a larger area than the area of the opening, and is housed in the lens barrel in such a way that the surface faces the opening; and a spray unit which is arranged to surround the opening, and sprays gas having higher cleanness than cleanness of gas outside the lens barrel onto the surface of the optical component.SELECTED DRAWING: Figure 2
Inventors:
YADA HIRONORI
Application Number:
JP2020070010A
Publication Date:
February 18, 2021
Filing Date:
April 08, 2020
Export Citation:
Assignee:
CANON KK
International Classes:
G03F7/20; G02B7/02; G03F7/22
Attorney, Agent or Firm:
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu