Title:
SPINNER DRYER
Document Type and Number:
Japanese Patent JP2021025725
Kind Code:
A
Abstract:
To provide a spinner dryer capable of preventing remaining of water on an adsorption surface by improving adsorption of a workpiece, shortening a drying process, and simplifying a device structure.SOLUTION: A spinner dryer includes a rotary spinner table 10, a spinner table pad 11 disposed on the spinner table 10 and having an adsorption surface 12 for holding a workpiece, and vacuum suction means for adsorbing the workpiece to the adsorption surface 12 while sucking a fluid from the adsorption surface 12. The adsorption surface 12 is provided with a suction port 15 connected to the vacuum suction means so that the fluid sucked by the vacuum suction means flows thereinto, and a suction groove 13 opened in a workpiece direction, and connected to the suction port 15 so that the fluid flows thereinto, and water component attached near the adsorption surface 12 of the workpiece is sucked and removed through the suction groove 13 and the suction port 15 in adsorbing the workpiece to the adsorption surface 12. Thus a drying process free from remaining of water, can be efficiently executed in a short time.SELECTED DRAWING: Figure 2
Inventors:
IDE SATORU
TAKAOKA KAZUHIRO
YAMAMOTO HIROSHI
TAKAOKA KAZUHIRO
YAMAMOTO HIROSHI
Application Number:
JP2019145366A
Publication Date:
February 22, 2021
Filing Date:
August 07, 2019
Export Citation:
Assignee:
OKAMOTO MACHINE TOOL WORKS
International Classes:
F26B5/08; B08B3/02; F26B11/18; F26B25/00; H01L21/304; H01L21/683
Domestic Patent References:
| JP2004319930A | 2004-11-11 |
Attorney, Agent or Firm:
Masahisa Otake