Title:
METHOD FOR DETERMINING PROPERNESS OF PROCESSING RESULT BY LASER PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2021030284
Kind Code:
A
Abstract:
To provide a method for determining properness of a processing result by a laser processing device, which can quantitatively determine whether a processing result is proper or not, on the laser processing device.SOLUTION: A method for determining properness of a processing result by a laser processing device includes: a laser processing step ST1 of performing penetration processing to a processing region of a work-piece held on a chuck table by emitting a laser beam to the region; a luminant lighting step ST2 of lighting a luminant; a photographing step ST3 of photographing all of the processing region while relatively moving a photographing unit and the work-piece after the laser processing step ST1 and the luminant lighting step ST2; a detecting step ST4 of detecting a region through which a beam is not transmitted in the processing region in a photographed image photographed in the photographing step ST3; and a determining step ST5 of determining that a readjustment of the laser processing device is unnecessary if the region through which the beam is not transmitted is not more than a predetermined largeness and determining that a readjustment of the laser processing device is necessary if the region is not less than the predetermined largeness, after the detecting step ST4.SELECTED DRAWING: Figure 5
More Like This:
| JP2000021696 | LASER MARKER AND MARKING METHOD |
| JPH08257778 | LASER BEAM WELDING MACHINE |
| WO/2018/150636 | METHOD FOR MANUFACTURING PEELED SUBSTRATE |
Inventors:
TAKEUCHI HIROKI
TAKENAKA MASANOBU
AKUTAGAWA YUKIHITO
TAKENAKA MASANOBU
AKUTAGAWA YUKIHITO
Application Number:
JP2019155068A
Publication Date:
March 01, 2021
Filing Date:
August 27, 2019
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B23K26/00; B23K26/382; H01L21/301
Domestic Patent References:
| JP2008200694A | 2008-09-04 | |||
| JP2010014554A | 2010-01-21 | |||
| JP2018118344A | 2018-08-02 | |||
| JP2013074021A | 2013-04-22 | |||
| JP2013152994A | 2013-08-08 | |||
| JP2009000928A | 2009-01-08 | |||
| JP2019058942A | 2019-04-18 | |||
| JP2018121031A | 2018-08-02 | |||
| JP2016055314A | 2016-04-21 | |||
| JPS6126590A | 1986-02-05 | |||
| JP2005118808A | 2005-05-12 | |||
| JP2010082644A | 2010-04-15 | |||
| JP2018120913A | 2018-08-02 | |||
| JP2019025583A | 2019-02-21 |
Foreign References:
| US20170236738A1 | 2017-08-17 |
Attorney, Agent or Firm:
Sakai International Patent Office