Title:
MAGNETIC BODY DETECTION SENSOR
Document Type and Number:
Japanese Patent JP2021047036
Kind Code:
A
Abstract:
To provide a magnetic body detection sensor that can suppress the generation of an offset and a shift in sensitivity due to the influence of a surrounding structure and that is difficult to shift an operating point when detecting a magnetic body.SOLUTION: A magnetic body detection sensor 100 of the present invention is provided with a first support substrate 101, a magnet 102 that is arranged on one main surface 101a side of the first support substrate so that a magnetization direction 102M is parallel to the main surface 101a of the first support substrate, a semiconductor chip 104 that is arranged on the one main surface 101a side of the first support substrate and that has a magnetic field detection element 103 to detect magnetic field components in a specific direction, and a soft magnetic material film 105 that is arranged on the other main surface 101b of the first support substrate and that extends in a direction parallel to the magnetization direction 102M of the magnet.SELECTED DRAWING: Figure 1
Inventors:
UEMURA HIROTAKA
Application Number:
JP2019168285A
Publication Date:
March 25, 2021
Filing Date:
September 17, 2019
Export Citation:
Assignee:
ABLIC INC
International Classes:
G01R33/02; G01R33/038; H01L43/06