Title:
VOLTAGE SENSOR
Document Type and Number:
Japanese Patent JP2021060281
Kind Code:
A
Abstract:
To provide a voltage sensor with which it is possible to further improve the accuracy of measuring the value of a voltage that is the measurement object.SOLUTION: A voltage sensor 1 comprises a vibrator 20 supported by mechanical support means 10; a fixed electrode 30 arranged to the vibrator 20 with a prescribed space therebetween; and a drive electrode 40 arranged at a position different from the fixed electrode 30, to which an AC drive voltage is applied in order to drive the vibrator 20. Electrostatic attraction is acted upon the vibrator 20 by applying a voltage Vm which is the measurement object to the fixed electrode 30, and the voltage Vm which is the measurement object is measured due to that the resonance frequency of the vibrator 20 changes. The vibrator 20 consists, at least in part, of a dual layered structure of a substance whose resonance frequency tends to decrease in correspondence to an increase in the temperature and a substance whose resonance frequency tends to increase in correspondence to an increase in the temperature.SELECTED DRAWING: Figure 2
Inventors:
KAGAMI KAZUYOSHI
Application Number:
JP2019184576A
Publication Date:
April 15, 2021
Filing Date:
October 07, 2019
Export Citation:
Assignee:
YAZAKI CORP
International Classes:
G01R15/16; G01R19/00; G01R19/32; G01R29/12
Attorney, Agent or Firm:
Nobuo Nakamura
Shoichi Masuka
Shoichi Masuka