Title:
MASK FOR VAPOR DEPOSITION AND MANUFACTURING METHOD OF ORGANIC EL PANEL
Document Type and Number:
Japanese Patent JP2021063277
Kind Code:
A
Abstract:
To provide a mask for vapor deposition for an outside of a display area capable of adding an opening, the opening being hard to deform or to change its position even by applying a tension stress especially for the mask for vapor deposition for forming a test piece for evaluation.SOLUTION: A mask for vapor deposition having a long shape in a first direction which is used in a vapor phase growth process in manufacturing a display panel and is used in a state in which a stress is applied in the first direction for forming a pattern for a quality control on a panel surface outside a display area of the display panel, includes: one or more first region in which a first opening is formed; and a second region which is adjacent to the pattern region in the first direction, is smaller in width in a second direction orthogonal to the first direction than the first opening, and has one or more long-sized second openings formed in the second direction.SELECTED DRAWING: Figure 1
Inventors:
SUGIMOTO AKIRA
Application Number:
JP2019189122A
Publication Date:
April 22, 2021
Filing Date:
October 16, 2019
Export Citation:
Assignee:
JOLED INC
International Classes:
C23C14/04; C23C16/04; G09F9/00; G09F9/30; H01L27/32; H01L51/50; H05B33/10
Attorney, Agent or Firm:
Patent business corporation Nakajima intellectual property integrated office