Title:
MEASURING APPARATUS OF SPECIMEN, MEASURING METHOD, AND PROGRAM
Document Type and Number:
Japanese Patent JP2021089146
Kind Code:
A
Abstract:
To provide a measuring apparatus of a specimen, a measuring method, and a program that can obtain an image showing a photonic band structure in a short time.SOLUTION: A measuring apparatus comprises: a mounting table 3 on which a specimen F, an object to be measured, is mounted; an irradiation optical system 4 for irradiating the specimen F mounted on the mounting table 3 with broadband light; an imaging optical system 5 including an infrared camera 6 for imaging a Fourier plane of light reflected from the specimen F; and a control unit 7 including an image generation unit 8 for generating a photonic band gap image from the image of the Fourier plane imaged by the infrared camera 6. The imaging optical system 5 includes a wavelength variable filter 30 in which the wavelength of the reflected light imaged by the infrared camera 6 can be changed by sweeping.SELECTED DRAWING: Figure 1
Inventors:
AMEMIYA TOMOHIRO
OKADA SHO
KAWAMURA KENICHI
OKADA SHO
KAWAMURA KENICHI
Application Number:
JP2019217786A
Publication Date:
June 10, 2021
Filing Date:
December 02, 2019
Export Citation:
Assignee:
TOKYO INST TECH
TOKYO INSTR INC
TOKYO INSTR INC
International Classes:
G01N21/3563; G01J3/51; G01N21/27
Domestic Patent References:
| JP2006275568A | 2006-10-12 | |||
| JP2014236127A | 2014-12-15 |
Foreign References:
| WO2016148075A1 | 2016-09-22 | |||
| US20160202414A1 | 2016-07-14 |
Other References:
SIYING PENG: "Probing the Band Structure of Topologoical Silicon Photonic Lattices in the Visible Spectrum", ＰＨＹＳＩＣＡＬ ＲＥＶＩＥＷ ＬＥＴＴＥＲ, JPN6023024771, March 2019 (2019-03-01), pages 1 - 6, ISSN: 0005086528
J. M. VAN DEN BROEK: "Inverse-Woodpile Photonic Band Gap Crystals with a Cubic Diamond-like Structure Made from Single-Cr", ADVANCED FUNCTIONAL MATERIALS, vol. 22, JPN6023024770, 2012, pages 25 - 31, ISSN: 0005086529
岡田祥: "光トポロジーを利用したSi基板上における光渦スプリッタに関する研究", 信学技報, vol. 119, no. 230, JPN7023002303, October 2019 (2019-10-01), JP, pages 113 - 118, ISSN: 0005086530
J. M. VAN DEN BROEK: "Inverse-Woodpile Photonic Band Gap Crystals with a Cubic Diamond-like Structure Made from Single-Cr", ADVANCED FUNCTIONAL MATERIALS, vol. 22, JPN6023024770, 2012, pages 25 - 31, ISSN: 0005086529
岡田祥: "光トポロジーを利用したSi基板上における光渦スプリッタに関する研究", 信学技報, vol. 119, no. 230, JPN7023002303, October 2019 (2019-10-01), JP, pages 113 - 118, ISSN: 0005086530
Attorney, Agent or Firm:
Isono International Patent and Trademark Office