Title:
GAS TREATMENT METHOD, STORAGE CABINET, INCUBATOR, AND STERILIZER
Document Type and Number:
Japanese Patent JP2021101888
Kind Code:
A
Abstract:
To provide a gas treatment method in which VOC can be treated with higher decomposition efficiency than before when a gas containing a substance to be treated belonging to VOC exists in an enclosed space.SOLUTION: The gas treatment method includes: (a) a step of taking in the gas in the enclosed space into the gas treatment device including an excimer lamp, (b) a step of emitting vacuum ultraviolet light from the excimer lamp to the gas in the gas treatment device to generate radical and decompose the substance to be treated, and (c) a step of exhausting the gas after treatment in which step (b) is executed into the enclosed space via an ozone decomposition filter.SELECTED DRAWING: Figure 1
Inventors:
NAITO KEISUKE
Application Number:
JP2019234723A
Publication Date:
July 15, 2021
Filing Date:
December 25, 2019
Export Citation:
Assignee:
USHIO ELECTRIC INC
International Classes:
A61L9/20; A61L2/20; A61L9/00
Domestic Patent References:
| JPH06238123A | 1994-08-30 | |||
| JP2006333954A | 2006-12-14 | |||
| JP2000166536A | 2000-06-20 | |||
| JPH0373152A | 1991-03-28 |
Foreign References:
| WO2019131124A1 | 2019-07-04 |
Attorney, Agent or Firm:
Patent Business Corporation Unias International Patent Office