Title:
METHOD AND APPARATUS FOR MANUFACTURING ALUMINUM NITRIDE POWDER
Document Type and Number:
Japanese Patent JP2021123508
Kind Code:
A
Abstract:
To provide a method for stably producing aluminum nitride by a reduction nitriding method, which involves preventing for a long period of time the deterioration of a material in a nitriding reaction chamber for performing a reduction nitriding reaction and a material of a baking container for supplying a raw material to the chamber.SOLUTION: When an aluminum nitride powder is produced by supplying a mixed raw material composed of aluminum oxide powder and carbon that is charged in a baking container to a nitriding reaction chamber heated to 1450 to 1800°C under a nitrogen atmosphere, as a pre-treatment of aluminum oxide nitriding, the mixed raw material and the baking container are heat-treated at a temperature of 650°C or more and less than 1250°C for 30 minutes or more under a nitrogen flow, and then the heat-treated mixed raw material and the baking container are supplied to the nitriding reaction chamber without bringing them into contact with outside air.SELECTED DRAWING: Figure 1
Inventors:
FUJIMOTO YUJI
FUJIMOTO MUNEHIRO
TAKEUCHI HISASHI
FUJIMOTO MUNEHIRO
TAKEUCHI HISASHI
Application Number:
JP2020016248A
Publication Date:
August 30, 2021
Filing Date:
February 03, 2020
Export Citation:
Assignee:
TOKUYAMA CORP
International Classes:
C01B21/072
Domestic Patent References:
| JPH0459609A | 1992-02-26 | |||
| JPH0459608A | 1992-02-26 | |||
| JPS6168310A | 1986-04-08 | |||
| JPH035310A | 1991-01-11 | |||
| JPS3621508B1 | ||||
| JPH01160812A | 1989-06-23 | |||
| JPH04108605A | 1992-04-09 | |||
| JP2006027923A | 2006-02-02 |
Foreign References:
| WO2013065556A1 | 2013-05-10 |
Attorney, Agent or Firm:
Patent corporation ssinpat