Title:
NITRIDE MATERIAL AND PIEZOELECTRIC MATERIAL COMPRISING THE SAME, AND MEMS DEVICE COMPRISING PIEZOELECTRIC MATERIAL
Document Type and Number:
Japanese Patent JP2021134138
Kind Code:
A
Abstract:
To provide a nitride material having at least one value of high figures of merit (piezoelectric constants (d33), piezoelectric stress constants (e33), elastic constants (C33), piezoelectric output constants (g33) and electromechanical coupling constants (k2), and a piezoelectric material comprising the same, and an MEMS device comprising the piezoelectric material.SOLUTION: The present disclosure provides a nitride material represented by chemical formula Al1-XYbXN, where the value of X is 0.60 or more and 1.00 or less.SELECTED DRAWING: Figure 5
Inventors:
HIRATA KENJI
UEHARA MASAHITO
YAMADA HIROSHI
ANGGRAINI SRI AYU
AKIYAMA MORIHITO
UEHARA MASAHITO
YAMADA HIROSHI
ANGGRAINI SRI AYU
AKIYAMA MORIHITO
Application Number:
JP2020168463A
Publication Date:
September 13, 2021
Filing Date:
October 05, 2020
Export Citation:
Assignee:
AIST
International Classes:
C04B35/50; B81B7/02; H01L41/09; H01L41/113; H01L41/187; H03H9/24
Domestic Patent References:
| JP2017511294A | 2017-04-20 | |||
| JP2017201050A | 2017-11-09 | |||
| JP2009010926A | 2009-01-15 |
Foreign References:
| US20170263847A1 | 2017-09-14 |
Attorney, Agent or Firm:
Takayuki Takamatsu
Tokuko Suzuki
Tokuko Suzuki