Title:
VALVE DEVICE
Document Type and Number:
Japanese Patent JP2021134916
Kind Code:
A
Abstract:
To provide a valve device which is capable of easily controlling a driving system and reduces a change of a flow rate property even in the case where there is a temperature change in a valve device body.SOLUTION: A valve device comprises: a plurality of actuators driving a plurality of valve parts; a valve function module including a plurality of valve parts and valve seats; and a housing in which the valve function module is accommodated. Each of the actuators includes: a base part which becomes a base; a piezoelectric element which is connected to a mounting surface of the base part and extends in a first length direction; a support member which extends while crossing the first length direction; and an actuation part which is connected with other ends of the piezoelectric element and the support member and drives the valve part by being displaced in a displacement direction with the elongation/contraction of the piezoelectric element. The housing includes: a supply port; a plurality of discharge ports from which a fluid supplied from the supply port is individually discharged; and a holding part holding the valve function module while keeping a cavity between the valve function module and the housing.SELECTED DRAWING: Figure 1
Inventors:
JO SEIKETSU
YANO TAKESHI
YANO AKIO
ITO TAKAFUMI
YANO TAKESHI
YANO AKIO
ITO TAKAFUMI
Application Number:
JP2020155727A
Publication Date:
September 13, 2021
Filing Date:
September 16, 2020
Export Citation:
Assignee:
MECHANO TRANSF CORP
SATAKE ENG CO LTD
SATAKE ENG CO LTD
International Classes:
F16K31/02; H01L41/053; H01L41/083; H01L41/09
Attorney, Agent or Firm:
Takuya Okano