Title:
OBSERVATION METHOD USING MICROSCOPE DEVICE
Document Type and Number:
Japanese Patent JP2021139958
Kind Code:
A
Abstract:
To provide an immersion objective that can correct chromatic aberration due to different immersion liquids in the immersion objective and correct chromatic aberration in correspondence with various immersion liquids.SOLUTION: An immersion objective 1 comprises: an objective 3 that has a refractive power; and a plurality of plane-parallel plates 5 that do not have a refractive power and have the same glass type. The plurality of plane-parallel plates 5 can be selectively arranged between the objective 3 and an immersion liquid 2. For a plurality of types of immersion liquids 2 having different dispersions, chromatic aberration is corrected by changing the thickness of the plane-parallel plates 5 arranged between the objective 3 and the immersion liquid 2.SELECTED DRAWING: Figure 5
Inventors:
TANABE TAKAHIRO
Application Number:
JP2020035232A
Publication Date:
September 16, 2021
Filing Date:
March 02, 2020
Export Citation:
Assignee:
KYOCERA SOC CORP
International Classes:
G02B21/02; G02B21/36
Domestic Patent References:
| JP2012506060A | 2012-03-08 | |||
| JPH11249024A | 1999-09-17 | |||
| JP2006184844A | 2006-07-13 |
Foreign References:
| WO2009096522A1 | 2009-08-06 | |||
| US20080106795A1 | 2008-05-08 | |||
| US20130271847A1 | 2013-10-17 | |||
| CN206638882U | 2017-11-14 |
Attorney, Agent or Firm:
Patent business corporation Oshima patent office