Title:
FLEXIBLE JOINT DEVICE
Document Type and Number:
Japanese Patent JP2021156345
Kind Code:
A
Abstract:
To provide a flexible joint device which can prevent vibration from being transmitted to a vacuum chamber.SOLUTION: A flexible joint device includes: a first member 31 having a flange part 35; a second member 32 having a housing part 36 that encloses the flange part 35; a bellows 38 connected to the first member 31 or the second member 32; and a seal device 45 which seals a gap between the flange part 35 and the housing part 36. The flange part 35 and the housing part 36 can move relative to each other.SELECTED DRAWING: Figure 3
Inventors:
ARAI YOICHI
Application Number:
JP2020056356A
Publication Date:
October 07, 2021
Filing Date:
March 26, 2020
Export Citation:
Assignee:
TASMIT INC
International Classes:
F16L27/10
Attorney, Agent or Firm:
Tetsuya Hirosawa
Isamu Watanabe
Isamu Watanabe