Title:
MEASUREMENT DEVICE, AND MEASUREMENT METHOD
Document Type and Number:
Japanese Patent JP2021162492
Kind Code:
A
Abstract:
To provide a measurement device that receives light from an object from a broad field-of-view angle range via a narrow band-pass filter.SOLUTION: A measurement device 100 comprises: an illumination unit 10 that projects probe light 10a having a wavelength distribution in a Y-axis direction in an in-measurement surface 9S including an object 9 to illuminate the object; and a detection unit 20 that detects reflection light from the object via a filter element 21 arranged on a Z-axis. Upon detecting the reflection light separated from background light by causing the reflection light from the object to pass through the narrow-band filter element, when a transmission wavelength of the filter element shifts (blue shift) on a short wavelength side in accordance with an angle viewing the object, that is, an incidence angle of the reflection light with respect to the Z-axis, the detection unit is configured to fit the wavelength distribution of the probe light with which the object is illuminated by the illumination unit to the shift of the transmission wavelength of the filter element in accordance with the incidence angle, and detect the object from a broad field-of-view angle range in which the transmission wavelength largely shifts exceeding a transmission band width, while separating the reflection light from, in particular, the background light including sunlight.SELECTED DRAWING: Figure 1
Inventors:
MURAKAMI TAKEHARU
WADA TOMOYUKI
WADA TOMOYUKI
Application Number:
JP2020065320A
Publication Date:
October 11, 2021
Filing Date:
March 31, 2020
Export Citation:
Assignee:
INSTITUTE PHYSICAL & CHEMICAL RES
International Classes:
G01B11/25
Attorney, Agent or Firm:
Longhua International Patent Service Corporation