Title:
【発明の名称】熱処理装置
Document Type and Number:
Japanese Patent JP2502977
Kind Code:
B2
Inventors:
AKIBA MASAKUNI
TAKAGAKI TETSUYA
TAKEUCHI YASUMASA
KOBAYASHI AKIHIRO
NAKAMURA HIROSHI
TAKAGAKI TETSUYA
TAKEUCHI YASUMASA
KOBAYASHI AKIHIRO
NAKAMURA HIROSHI
Application Number:
JP8792886A
Publication Date:
May 29, 1996
Filing Date:
April 18, 1986
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/205; H01L21/22; H01L21/31; (IPC1-7): H01L21/205; H01L21/22; H01L21/31
Domestic Patent References:
| JPS60109219A | ||||
| JP60149130B | ||||
| JPS61247685A |
Attorney, Agent or Firm:
Yamato Tsutsui