Title:
【発明の名称】圧電アクチユエ-タの温度補償方法
Document Type and Number:
Japanese Patent JP2505425
Kind Code:
B2
Abstract:
PURPOSE:To reduce the change in height of the head of a piezoelectric actuator with respect to temperature, by converting the electrostatic capacitances of a plurality of laminated piezoelectric elements having the same structure into voltages, and changing DC bias voltages, which are applied to the other piezoelectric elements with said voltages. CONSTITUTION:Electrostatic capacitances between electrodes of piezoelectric elements 1 are changed with ambient temperature. The oscillating frequency of each oscillating circuit 2 is determined by capacitance between electrodes of the piezoelectric element 1. The output of the oscillating circuit 2 is applied to a frequency-voltage conversion circuit 3. Its output is adjusted to an adequate correcting amount, and the result is applied to an adding circuit 5. A driving signal for a piezoelectric actuator is applied to the other input of the adding circuit 5. The output of the adding circuit 5 becomes a signal, which is obtained by changing the DC bias voltage of the driving signal for the piezoelectric actuator at an input terminal 4 by the temperature. The output of the adding circuit 5 is amplified to the voltage required for driving a piezoelectric actuator 7 by a driving circuit 6. Therefore the position of the height of the head of the piezoelectric actuator is not changed even if the ambient temperature is changed.
Inventors:
Makino Shingo
Application Number:
JP22565286A
Publication Date:
June 12, 1996
Filing Date:
September 22, 1986
Export Citation:
Assignee:
Kansai NEC Corporation
International Classes:
H01L41/09; G05D3/00; G11B5/592; H01L41/04; H02N2/00; (IPC1-7): H01L41/09