【発明の名称】押付力調整装置

Title:

【発明の名称】押付力調整装置

Document Type and Number:

Japanese Patent JP2511860

Kind Code:

B2

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Inventors:

KANEKO FUJIKATSU
YAZAKI NORIHIRO
KARASAWA MIKIO
IBE SHINGO

Application Number:

JP29270085A

Publication Date:

July 03, 1996

Filing Date:

December 27, 1985

Export Citation:

Assignee:

HITACHI SEISAKUSHO KK
HITACHI DENSHI ENJINIARINGU KK

International Classes:

H01L21/52; B25J19/00; H01L21/58; H01L21/67; H01L21/677; H01L21/68; (IPC1-7): H01L21/52; B25J19/00

Domestic Patent References:

JP60178637A

Attorney, Agent or Firm:

Katsuo Ogawa (1 person outside)

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