Title:
【発明の名称】二層構造電子線レジスト用平坦化材料
Document Type and Number:
Japanese Patent JP2516968
Kind Code:
B2
Inventors:
KAWASAKI YOKO
SAITO KAZUMASA
FUKUYAMA SHUNICHI
SHIBA SHOJI
WATABE KEIJI
SAITO KAZUMASA
FUKUYAMA SHUNICHI
SHIBA SHOJI
WATABE KEIJI
Application Number:
JP10720087A
Publication Date:
July 24, 1996
Filing Date:
April 30, 1987
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
G03F7/00; G03C1/00; G03C1/76; G03F7/004; G03F7/075; G03F7/09; G03F7/11; (IPC1-7): G03F7/11; G03F7/075
Domestic Patent References:
| JP59107347A | ||||
| JP5993441A | ||||
| JP61144639A | ||||
| JP608839A | ||||
| JP58502169A |
Attorney, Agent or Firm:
Teiichi