Title:
【考案の名称】ワーク保持装置
Document Type and Number:
Japanese Patent JP2522840
Kind Code:
Y2
More Like This:
Inventors:
Suzuki Ritoshi
Nobuo Otsu
Nobuo Otsu
Application Number:
JP9849990U
Publication Date:
January 16, 1997
Filing Date:
September 21, 1990
Export Citation:
Assignee:
Fuji Xerox Co., Ltd
International Classes:
B25J15/06; B65H9/08; H01L21/677; H01L21/68; (IPC1-7): B25J15/06
Domestic Patent References:
| JP62222992A |
Attorney, Agent or Firm:
Takahide Tanaka (2 outside)