Title:
【発明の名称】バンプ付きフイルムキヤリアの製造方法
Document Type and Number:
Japanese Patent JP2532075
Kind Code:
B2
Inventors:
YAMAMOTO HIROSHI
SHIMAZU HIROSHI
INOE KAZUHIKO
SHIMAZU HIROSHI
INOE KAZUHIKO
Application Number:
JP30855086A
Publication Date:
September 11, 1996
Filing Date:
December 26, 1986
Export Citation:
Assignee:
KYUSHU HITACHI MAKUSERU KK
HITACHI MAKUSERU KK
HITACHI MAKUSERU KK
International Classes:
H01L21/60; (IPC1-7): H01L21/60
Domestic Patent References:
| JP61242055A | ||||
| JP6034048A | ||||
| JP6012749A | ||||
| JP59113654A |
Attorney, Agent or Firm:
Kenjiro Take