Title:
【考案の名称】ウェーハ剥し治具
Document Type and Number:
Japanese Patent JP2545562
Kind Code:
Y2
Inventors:
Shinichi Sakakibara
Kabayama
Kabayama
Application Number:
JP10505391U
Publication Date:
August 25, 1997
Filing Date:
December 19, 1991
Export Citation:
Assignee:
Komatsu Electronic Metals Co., Ltd.
International Classes:
B25B33/00; B25B27/14; B65H41/00; H01L21/304; H01L21/68; H01L21/683; (IPC1-7): H01L21/304; B25B27/14; B65H41/00; H01L21/68
Domestic Patent References:
| JP1319938A | ||||
| JP164499U | ||||
| JP38432U |
Attorney, Agent or Firm:
Shigeru Yagita (2 outside)