Title:
【発明の名称】半導体装置
Document Type and Number:
Japanese Patent JP2545953
Kind Code:
B2
Inventors:
SATO SADANOBU
Application Number:
JP25350588A
Publication Date:
October 23, 1996
Filing Date:
October 06, 1988
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H01L29/73; H01L21/331; H01L21/76; H01L23/29; H01L23/31; H01L29/06; H01L29/732; (IPC1-7): H01L21/76; H01L21/331; H01L29/73
Domestic Patent References:
| JP62132355A | ||||
| JP5742148A |
Other References:
菅野卓雄監修超高速ＭＯＳデバイス培風館ｐ．１２６−１２９
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)