Title:
【考案の名称】イオンビームスパッタ成膜装置
Document Type and Number:
Japanese Patent JP2548516
Kind Code:
Y2
Inventors:
Jun'ichi
Application Number:
JP5791291U
Publication Date:
September 24, 1997
Filing Date:
June 28, 1991
Export Citation:
Assignee:
Elionix Co., Ltd.
International Classes:
C23C14/46; H01J37/34; (IPC1-7): C23C14/46
Attorney, Agent or Firm:
Yuji Takahashi (1 person outside)