【発明の名称】電子サイクロトロン共鳴プラズマの化学蒸着装置

Title:

【発明の名称】電子サイクロトロン共鳴プラズマの化学蒸着装置

Document Type and Number:

Japanese Patent JP2548786

Kind Code:

B2

Inventors:

KAWAI YOSHINOBU
MURATA MASAYOSHI
TAKEUCHI YOSHIAKI
UCHIDA SATOSHI

Application Number:

JP32304988A

Publication Date:

October 30, 1996

Filing Date:

December 21, 1988

Export Citation:

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Assignee:

MITSUBISHI HEAVY IND LTD

International Classes:

C23C16/50; C23C16/27; C23C16/511; H01L21/205; H01L21/302; H01L21/3065; H01L21/31; (IPC1-7): C23C16/50; H01L21/205; H01L21/3065; H01L21/31

Domestic Patent References:

JP62116775A
JP63301497A
JP63318099A
JP2137223A

Attorney, Agent or Firm:

Takehiko Suzue (2 outside)

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