Title:
【発明の名称】現像装置
Document Type and Number:
Japanese Patent JP2549414
Kind Code:
B2
More Like This:
Inventors:
SATO HITOSHI
KITAZAWA TSUTOMU
KITAZAWA TSUTOMU
Application Number:
JP7632588A
Publication Date:
October 30, 1996
Filing Date:
March 31, 1988
Export Citation:
Assignee:
SHIBAURA ENG WORKS LTD
International Classes:
G03D3/00; G03D5/04; G03F7/30; (IPC1-7): G03F7/30
Domestic Patent References:
| JP60196753A |
Attorney, Agent or Firm:
Mitsuharu Kiuchi