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Title:
【発明の名称】水蒸気乾燥装置
Document Type and Number:
Japanese Patent JP2557515
Kind Code:
B2
Inventors:
OOTAKE MITSUYOSHI
WATANABE MASAHIRO
HAMANO MEGUMI
Application Number:
JP374289A
Publication Date:
November 27, 1996
Filing Date:
January 12, 1989
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
F26B21/00; F26B1/00; F26B19/00; F26B21/14; H01L21/304; (IPC1-7): H01L21/304; F26B1/00; F26B19/00; F26B21/00; F26B21/14
Domestic Patent References:
JP62173720A
JP634616A
JP6336533A
JP63307742A
Attorney, Agent or Firm:
薄田 利幸



 
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