【発明の名称】固体上に炭素膜を形成する方法

Title:

【発明の名称】固体上に炭素膜を形成する方法

Document Type and Number:

Japanese Patent JP2564589

Kind Code:

B2

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Inventors:

YAMAZAKI SHUNPEI

Application Number:

JP1307988A

Publication Date:

December 18, 1996

Filing Date:

January 22, 1988

Export Citation:

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Assignee:

HANDOTAI ENERGY KENKYUSHO

International Classes:

C23C16/26; C23C16/27; C23C16/50; C23C16/511; C23C16/54; H01L21/205; H05K3/28; (IPC1-7): C23C16/26; C23C16/50; H01L21/205; H05K3/28

Domestic Patent References:

JP6283471A
JP62161960A

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