Title:
【考案の名称】基板処理装置
Document Type and Number:
Japanese Patent JP2565625
Kind Code:
Y2
Inventors:
Nakamura Tsugio
Mitsuaki Yoshiya
Mitsuaki Yoshiya
Application Number:
JP6907892U
Publication Date:
March 18, 1998
Filing Date:
September 07, 1992
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B05C9/10; B08B3/02; G02F1/13; H01L21/304; H05K3/06; H05K3/26; (IPC1-7): B08B3/02; B05C9/10; G02F1/13; H01L21/304; H05K3/06; H05K3/26
Domestic Patent References:
| JP55139260A | ||||
| JP3284386A | ||||
| JP2241582A | ||||
| JP1292892A | ||||
| JP245180U | ||||
| JP2133485U | ||||
| JP176758U | ||||
| JP63107656U | ||||
| JP62199945U | ||||
| JP5743892U | ||||
| JP179457U | ||||
| JP6080761U | ||||
| JP5627597B2 | ||||
| JP112004Y2 |
Attorney, Agent or Firm:
Tsutomu Sugitani