Title:
【発明の名称】露光装置及び素子製造方法
Document Type and Number:
Japanese Patent JP2571054
Kind Code:
B2
Abstract:
An illuminance distribution measuring system which includes a two-dimensional (area) sensor array to be disposed on the surface being illuminated by a pulsed laser beam from a pulsed laser and a signal processor operable, in response to output signals of the sensor array, to detect the illuminance distribution on the surface being illuminated.
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Inventors:
OOCHI CHIGUSA
Application Number:
JP10302687A
Publication Date:
January 16, 1997
Filing Date:
April 28, 1987
Export Citation:
Assignee:
CANON KK
International Classes:
G01J1/02; G01J1/42; G01J1/44; G03F7/20; H01L21/027; H01L21/30; (IPC1-7): G01J1/02; H01L21/027
Domestic Patent References:
| JP60168026A | ||||
| JP57101839A | ||||
| JP61154128A | ||||
| JP61177723A | ||||
| JP6252929A |
Attorney, Agent or Firm:
Tatsuo Ito (1 outside)