Title:
【発明の名称】連続真空蒸着装置
Document Type and Number:
Japanese Patent JP2575891
Kind Code:
B2
Inventors:
TAGUCHI TOSHIO
OKITA HAJIME
KAMIKAWA SUSUMU
OKITA HAJIME
KAMIKAWA SUSUMU
Application Number:
JP24348589A
Publication Date:
January 29, 1997
Filing Date:
September 21, 1989
Export Citation:
Assignee:
MITSUBISHI HEAVY IND LTD
International Classes:
C23C14/56; (IPC1-7): C23C14/56
Domestic Patent References:
| JPS5989765A |
Attorney, Agent or Firm:
Akasaka Saka (2 people outside)