Title:
【発明の名称】プローブ装置
Document Type and Number:
Japanese Patent JP2578361
Kind Code:
B2
Inventors:
YAMASAKA CHIKAHITO
Application Number:
JP17872788A
Publication Date:
February 05, 1997
Filing Date:
July 18, 1988
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
G01B11/24; G01N21/88; G01N21/956; G01R31/26; H01L21/027; H01L21/30; H01L21/66; H01L21/68; (IPC1-7): G01R31/26; H01L21/66; H01L21/68
Domestic Patent References:
| JP5854648A |
Attorney, Agent or Firm:
Hajime Ohara